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Microbeam analysis. Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above

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Microbeam analysis. Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above1 Scope This International Standard gives guidance on the quantitative analysis at specific points or areas of a specimen using energy dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA); any expression of amount, i. e. in terms of percent (mass fraction), as large small or major minor amounts is deemed to be quantitative. The correct identification of all elements present in the

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